MEMS Gas Sensors: A Review | IEEE Journals & Magazine - IEEE …
2021年6月23日 · This paper presents a comprehensive review of the state-of-the-art gas sensors, which have been developed for gas sensing applications using MEMS technology. The working principle, the structure, the sensitive material and the important characteristics of each of these sensors are discussed.
A review of MEMS-based metal oxide semiconductors gas sensor …
2022年3月23日 · This review summarizes the development of MEMS-based MOSs gas sensors in terms of the MEMS micro-hotplate, wafer-scale deposition and patterning methods for MOS materials, and several latest applications.
(PDF) MEMS Gas Sensors: A Review - ResearchGate
2021年6月23日 · Micro-electromechanical system (MEMS) gas sensors represent a system that is capable of detecting the existence and concentration of gasses in the...
Graphene-based MEMS devices for gas sensing ... - ScienceDirect
For movable MEMS sensors, including surface acoustic wave (SAW), electromechanical, and capacitive gas sensors, the application of graphene as either a freestanding membrane or part of a resonator-based system that utilizes frequency shifts for precise gas measurement, enabling detection through mechanical motion.
MEMS Gas Sensors - from Nanomaterials to Microelectrodes
MEMS gas sensors have attracted increasing attention owing to their compact size, high sensitivity and compatible fabrication process. This article briefly summarizes our recent works on the development of MEMS gas sensors based on metal-oxide semiconductor (MOS) nanomaterials for the detection of ethanol, acetone, NO 2 , H 2 S, etc.
Unraveling the nature of sensing in electrostatic MEMS gas sensors
2024年5月6日 · This paper investigates the fundamental sensing mechanism of electrostatic MEMS gas sensors. It compares among the responsivities of a set of MEMS isopropanol sensors before and after...
A Highly Selective MEMS-Based Gas Sensor With Gelatin-Carbon …
This study aims to fabricate a highly sensitive, stable, and accurate multitask gas sensor for gas detection. The gas sensor comprises the super-thin CB-GE film and patterned sophisticated electrodes. The microelectromechanical system (MEMS) fabricating method and the TFNC coating method promise the successful fabrication of electrodes and ...
A Review of Actuation and Sensing Mechanisms in MEMS-Based Sensor ...
2021年1月26日 · Proper understanding of the actuating and sensing mechanisms for the MEMS-based sensor devices play a vital role in their selection and effective application in various innovative technologies.
MEMS based highly sensitive dual FET gas sensor using graphene ...
2018年4月12日 · The proposed dual-gate FET gas sensor in this study has potential applications in various fields, such as electronic noses and automobiles, owing to its low-power consumption, easy integration...
Toward highly sensitive, selective, and stable palladium‐based MEMS gas ...
Currently, the key focus areas in the development of resistive MEMS semiconductor hydrogen gas sensors include (i) the design and enhancement of sensitive materials, (ii) the manufacturing of reliable microchips and their on-chip compatible integration, and (iii) the decoupling and modulation of sensitization mechanisms under multiple external ...
- 某些结果已被删除