utilizing quartz sensors with its SDD3000 gyro and SDI500 IMU, along with the smallest tactical INS/GPS with its SDN500. MEMS technology is often associated with silicon, but Quartz MEMS, pioneered by ...
Piezoelectric transducers are used as electromechanical resonators. Quartz resonator sensors are well known from their use as time bases for frequency control. The chapter summarizes properties of ...
Later, he concentrated his research work on piezoresonance quartz sensors on bulk acoustic waves (BAW). He established a BAW sensor group that developed a series of quartz resonance temperature ...